Clean Room Floor Systems

The integration of semiconductors is increasingly progressing, while there has also been outstanding progress made in terms of the accompanying accuracy of peripheral equipment. These efforts are supported by the use of super clean rooms. To eliminate dust, as a matter of course, the floor materials partly responsible for the space are subject to stringent checks.

Including ultra heavy duty panels, which are applicable for increasing the weight of equipment, we provide products to meet diversified customer needs for clean rooms.

The Hitachi clean floor, created through the rich experience and performance of Hitachi Metals Techno, Ltd. for double floors, will respond to the highly developing needs for the domain of electronic precision instruments, supported by its comprehensive technical capabilities.